產品介紹

精密研磨拋光布 Polishing Pads
產品型號︰Chemcloth / EP1
廠  牌︰Logitech
產品簡介︰各類精密研磨拋光專用拋光布,適合半導體及光電樣品的應用。選擇性高,應用範圍廣
產品規格
Cat. No. Description
0CON-352
Chemcloth Polishing Pad
12" / 300mm diameter, pack of 10
Compatible with PM5/PM6
0CON-353
Chemcloth Polishing Pad
14" / 355mm diameter, pack of 10
Compatible with LP50
0CON-471
Chemcloth Polishing Pad
16" / 400mm diameter, pack of 10
Compatible with Tribo
0CON-398
EP1 12" Diameter Grooved - Pack of 5
Grooved, expanded Polyurethane Polishing Pad - 0.050" thick W/PSA backing with 10mm XY Grooving (Type 12EP1G). Compatible with PM5/PM6
0CON-386
EP1 12" Diameter Grooved - Pack of 5
Grooved expanded Polyurethane Polishing Pad - 0.050" thick W/PSA backing with 10mm XY Grooving (Type 12EP2G) Compatible with PM5/PM6

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產品介紹
  1. Logitech Chemcloth Polishing Cloths achieve very high levels of surface finish on many different material types.

Chemcloths are used primarily for final wafer polishing. It is manufactured from proprietary polyurethane and incorporates a vertically oriented pore structure with a compressible substrate. The substrate is designed to instantaneously recover from polishing compression, creating a pumping action that enhances slurry flow within the pad to produce optimum surface finish quality. These properties reduce pad loading and increases pad life.

These pads are suitable for polishing delicate semiconductor materials such as Gallium Arsenide with Chemlox Polishing Fluid.

 

  1. EP1: Polyutherane Pads

These pads have a foamed elastometer structure with controlled cells. This unique structure and high hardness improves planarity and is designed for optimum polishing of Silicon, Sapphire and optical materials. The EP1 pads are supplied with a pressure sensitive adhesive backing for excellent flatness control. Shore A Hardness 97.

 

  1. EP2: Polyutherane Pads

These pads have a micro-cellular structure that enables it to act in a "sponge like" manner, while maintaining the hardness and flatness. Pads are supplied with a pressure sensitive adhesive backing. Excellent flatness control and fast polishing rates. Shore Hardness 86.

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