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Jig type | PLJ1(x1) or PLJ2(X1) |
Plate speed | 5-100 rpm |
Plate size | 300mm |
Max. Sample Size | PLJ1: 4 slides 25 x 75mm or 2 slides 50 x 75mm or one slide 110 x 75mm PLJ2: 6 slides 28 x 48mm or 2 slides 25 x 75mm plus 3 slides 28 x 48mm or 1 slide 50 x 75mm plus 3 slides 28 x 48mm |
Plate Flatness Monitor | 0.1 Micron Resolution(Autolap機型適用, Bluetooth Enabled) |
Abrasive Delivery | Up to 2x 2L Cylinders, Measured flow Peristaltic pump : 1-100ml/min(依機型選擇而定) |
Colloidal Delivery | Peristaltic pump : 1-100ml/min(依機型選擇而定) |
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影片連結:
產品特色:
桌上型精密研磨拋光機(1 Station),最適合用於實驗室研發及小量精密樣品量產之用。應用範圍廣,不論是地質樣品(Geological thin section)、複合半導體(Compound Semiconductor such as GaAs and InP)、光學材料(Optical Materials such as Lithium Niobate)及矽晶圓(Silicon)等樣品均適用。PM6為單機操作,具有彩色觸控面板控制各項參數,並具有兩組研磨筒及一組拋光筒(依機型而定)及可以自動控制修整盤面平整度的機型
(Autolap機型)供客戶選擇
PM6共有三種機型可供選擇: